Number: 2853113
Country: Finland
Source: TED
Atomic Layer Deposition System.
An atomic layer deposition system.
The following field upgradeable options without need to swap-out the system or to move the system to any place to make the upgrades:
— Wafer batch capability. (Capability to coat 100 mm wafers in batches. It should be possible to coat at least five wafers simultaneously.)
— Particles coating option. (Possibility to have powders/particles as substrate material in the atomic layer deposition coating process.).
Atomic Layer Deposition System